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Semiconductor Lithography: Principles, Practices, And Materials (Microdevices)
Publisher: Springer
SKU: DADAX0306421852
ISBN : 9780306421853
Condition : New
SKU: DADAX0306421852
ISBN : 9780306421853
Condition : New
Price:
$258.81
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Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)
This volume brings together the work of many scientists and engineers over the last ten years and focuses on the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.
Specification of Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)
| GENERAL | |
|---|---|
| Author | Wayne M. Moreau |
| Binding | Paperback |
| Language | English |
| Edition | 1 |
| ISBN-10 | 0306421852 |
| ISBN-13 | 9780306421853 |
| Publisher | Springer |
| Publication Year | 1987 |
| DIMENSIONS | |
|---|---|
| Height | 7 inch. |
| Length | 2 inch. |
| Width | 10.5 inch. |
| Weight | 3.44 pounds. |
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