CMOS Hotplate Chemical Microsensors (Microtechnology And MEMS)
ISBN : 9783540695615
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CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Specification of CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)
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