Fundamentals Of Microfabrication

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SKU: SONG0849394511
ISBN : 9780849394515
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Fundamentals of Microfabrication

Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference.
Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

Specifications of Fundamentals of Microfabrication

GENERAL
AuthorMarc J. Madou
BindingHardcover
LanguageEnglish
Edition1
ISBN-100849394511
ISBN-139780849394515
PublisherCRC Press
Number Of Pages589
Publication Date1997-09-26
DIMENSIONS
Height11.25 inch.
Length1.5 inch.
Width8.75 inch.
Weight4.36 pounds.

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