Silicon VLSI Technology: Fundamentals, Practice, And Modeling

Silicon VLSI Technology: Fundamentals, Practice, and Modeling

Unique in approach, this book provides anintegrated view of silicon technology--with an emphasis onmodern computer simulation. It describes not only themanufacturing practice associated with the technologies used insilicon chip fabrication, but also the underlying scientific basis forthose technologies. Modern CMOS Technology. CrystalGrowth, Wafer Fabrication and Basic Properties of Silicon Wafers.Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning andGettering. Lithography. Thermal Oxidation and the Si/SiO2Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion.Etching. Backend Technology. For anyone interested in Fabrication Processes.