RF MEMS And Their Applications

RF MEMS and Their Applications

Microelectromechanical systems (MEMS) refer to a collection ofmicro-sensors and actuators, which can react to environmentalchange under micro- circuit control. The integration of MEMS intotraditional Radio Frequency (RF) circuits has resulted in systemswith superior performance levels and lower manufacturing costs. Theincorporation of MEMS based fabrication technologies into micro andmillimeter wave systems offers viable routes to ICs with MEMSactuators, antennas, switches and transmission lines. The resultantsystems operate with an increased bandwidth and increased radiationefficiency and have considerable scope for implementation withinthe expanding area of wireless personal communication devices. Thistext provides leading edge coverage of this increasingly importantarea and highlights the overlapping information requirements of theRF and MEMS research and development communities.* Provides an introduction to micromachining techniques and theiruse in the fabrication of micro switches, capacitors andinductors* Includes coverage of MEMS devices for wireless and Bluetoothenabled systemsEssential reading for RF Circuit design practitioners andresearchers requiring an introduction to MEMS technologies, as wellas practitioners and researchers in MEMS and silicon technologyrequiring an introduction to RF circuit design.