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Product Description The Advanced Metallization Conference (AMC) marked its twentieth anniversary in 2003. Technical leaders from around the world gather to discuss developments in the areas of interconnect performance, advanced metallization, lowdielectric constant materials, barrier metallization, atomic layer deposition, vertical integration, advanced packaging and optical interconnects. In particular, presentations highlight both the advances and future challenges associated with multilevel interconnect. The latest developments in the integration of copperbased metallization with lowdielectric constant materials, and advances in the understanding of copper morphology and the reliability of the component materials of interconnect systems, are featured. Additional contributions discuss the development of advanced materials and advanced process technologies. Optimization of interconnect performance and density, and alternatives to metalbased interconnect, are addressed in papers on interconnect performance issues, vertical integration and systeminapackage versus systemonachip. Book Description The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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birth defects, or other reproductive harm.
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