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Handbook Of Semiconductor Silicon Technology,Used
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This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.
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- Q: What is the main focus of the Handbook of Semiconductor Silicon Technology? A: The handbook provides a comprehensive summary of the science, technology, and manufacturing processes related to semiconductor silicon materials, covering every known property of silicon.
- Q: Who is the author of this handbook? A: The book is authored by William C. O'Mara.
- Q: When was the Handbook of Semiconductor Silicon Technology published? A: It was published on January 14, 1990.
- Q: How many pages does the handbook contain? A: The handbook contains a total of 795 pages.
- Q: What topics are covered in this handbook? A: Topics include silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, and various deposition techniques, along with practical aspects such as materials handling and impurity reduction.
- Q: Does the handbook include any diagrams or tables? A: Yes, it includes a complete set of binary phase diagrams and extensive tables of materials constants and silicon properties.
- Q: Is the handbook suitable for beginners in semiconductor technology? A: While it covers fundamental concepts, the detailed technical nature may be more suited for readers with some background in semiconductor technology.
- Q: What kind of properties of silicon are discussed in the book? A: The book discusses electrical, optical, mechanical properties, deep level impurities, carrier lifetime, and thermochemistry of silicon.
- Q: What edition of the handbook is available? A: This is the first edition of the Handbook of Semiconductor Silicon Technology.
- Q: What binding type is used for this handbook? A: The handbook is available in hardcover binding.