Title
Handbook Of Vlsi Microlithography: Principles, Technology And Applications (Materials Science And Process Technology)
Delivery time: 8-12 business days (International)
This Handbook Gives Readers A Close Look At The Entire Technology Of Printing Very High Resolution And High Density Integrated Circuit (Ic) Patterns Into Thin Resist Process Transfer Coatings Including Optical Lithography, Electron Beam, Ion Beam, And Xray Lithography. The Book'S Main Theme Is The Special Printing Process Needed To Achieve Volume High Density Ic Chip Production, Especially In The Dynamic Random Access Memory (Dram) Industry.The Book Leads Off With A Comparison Of Various Lithography Methods, Covering The Three Major Patterning Parameters Of Line/Space, Resolution, Line Edge And Pattern Feature Dimension Control. The Book'S Explanation Of Resist And Resist Process Equipment Technology May Well Be The First Practical Description Of The Relationship Between The Resist Process And Equipment Parameters. The Basics Of Resist Technology Are Completely Covered Including An Entire Chapter On Resist Process Defectivity And The Potential Yield Limiting Effect On Device Production.Each Alternative Lithographic Technique And Testing Method Is Considered And Evaluated: Basic Metrology Including Optical, Scanningelectronmicroscope (Sem) Techniques And Electrical Test Devices, Along With Explanations Of Actual Printing Tools And Their Design, Construction And Performance. The Editor Devotes An Entire Chapter To Today'S Sophisticated, Complex Electronbeam Printers, And To The Emerging Xray Printing Technology Now Used In Highdensity Cmos Devices. Energetic Ion Particle Printing Is A Controllable, Steerable Technology That Does Not Rely On Resist, And Occupies A Final Section Of The Handbook.
By changing our most important processes and
products, we have already made a big leap forward. This ranges from the
increased use of more sustainable fibers to the use of more
environmentally friendly printing processes to the development of
efficient waste management in our value chain.
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Shipping & Returns
Shipping
We ship your order within 2–3 business days for USA deliveries and 5–8 business days for international shipments. Once your package has been dispatched from our warehouse, you'll receive an email confirmation with a tracking number, allowing you to track the status of your delivery.
Returns
To facilitate a smooth return process, a Return Authorization (RA) Number is required for all returns. Returns without a valid RA number will be declined and may incur additional fees. You can request an RA number within 15 days of the original delivery date. For more details, please refer to our Return & Refund Policy page.
Warranty
We provide a 2-year limited warranty, from the date of purchase for all our products.
If you believe you have received a defective product, or are experiencing any problems with your product, please contact us.
This warranty strictly does not cover damages that arose from negligence, misuse, wear and tear, or not in accordance with product instructions (dropping the product, etc.).
Warranty
We provide a 2-year limited warranty, from the date of purchase for all our products.
If you believe you have received a defective product, or are experiencing any problems with your product, please contact us.
This warranty strictly does not cover damages that arose from negligence, misuse, wear and tear, or not in accordance with product instructions (dropping the product, etc.).
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Secure Payment
Your payment information is processed securely. We do not store credit card details nor have access to your credit card information.
We accept payments with :
Visa, MasterCard, American Express, Paypal, Shopify Payments, Shop Pay and more.