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This PhD thesis describes the realization of integrated optical components in SilicononInsulator (SOI) material. In particular, the thesis is focused on the realization of MachZehnder delay interferometers (MZDI) in 4m SOI technology. As an example, the ability of MZDI for the demodulation of phasemodulated data signals is investigated. The thesis considers in detail the design of the basic components for the realization of MZDIs in SOI technology. These components are singlemode waveguides and multimode interference (MMI) couplers. Following simulations and iterations of the fabrication, these components can be realized with highperformance. Based on these components, the performance of the MZDIs is investigated. Typical extinction ratios are in the range of 30 dB. The polarizationdependent frequency shift (PDFS) is reduced to about 0.2 GHz. Furthermore, the hybrid integration of active InP components on SOI platform is shown. Based on flipchip technology, this includes the realization of an integrated optical DPSK receiver and an integrated alloptical wavelength converter.
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