Microlithography: Science And Technology,New

Microlithography: Science And Technology,New

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SKU: DADAX0824799534
Brand: Crc Press
Condition: New
$170.30
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This Selfcontained Text Details Both Elementary And Advanced Aspects Of Submicron Microlithography Providing A Balanced Treatment Of Theoretical And Operating Practices As Well As Complete Information On Current Research In The Field. Including Discussions On Electron Beam, Xray, And Proximal Probe Techniques And Enhanced With Timesaving Citations To Key Sources In The Literature And More Than 600 Tables, Equations, Drawings, And Photographs That Clarify The Material, The Book Covers Mechanical Systems, Optics, Excimer Laser Light Sources, Alignment Techniques And Analysis, Resist Chemistry, Processing, Multilayer Lithography, Plasma And Reactive Ion Etching, Metrology, And More.

⚠️ WARNING (California Proposition 65):

This product may contain chemicals known to the State of California to cause cancer, birth defects, or other reproductive harm.

For more information, please visit www.P65Warnings.ca.gov.

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