Title
Multiscale process monitoring in Nanomanufacturing: Case Study: Nanowafer in CMP process,Used
Delivery time: 8-12 business days (International)
The detection of the end of polishing during the chemical mechanical planarization (CMP) process is a critical task in semiconductor manufacturing. Even the research in CMP has grown and developed, one cannot predict the End point detection in order to avoid over or underpolishing wafer. The disadvantages of offline approach in endpoint detection have incited the researchers to discover an efficient substitute. In this Master thesis, an alternative approach named online method has been presented in which a sequential probability ratio test (SPRT) was developed and applied to the wavelet decomposed Acoustic emission data collected during the progression of the CMP process. Two dispersion parameters were used to detect endpoint, the first one standard deviation and the second the coefficient of variation. This test is shown to be efficient in controlling complex processes and appropriated for realtime application by developing a moving block strategy. This book is useful in industrial statistic especially in process control and also for in the field of the semiconductor production especially in CMP process.
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For more information, please visit www.P65Warnings.ca.gov.
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Shipping & Returns
Shipping
We ship your order within 2–3 business days for USA deliveries and 5–8 business days for international shipments. Once your package has been dispatched from our warehouse, you'll receive an email confirmation with a tracking number, allowing you to track the status of your delivery.
Returns
To facilitate a smooth return process, a Return Authorization (RA) Number is required for all returns. Returns without a valid RA number will be declined and may incur additional fees. You can request an RA number within 15 days of the original delivery date. For more details, please refer to our Return & Refund Policy page.
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Warranty
We provide a 2-year limited warranty, from the date of purchase for all our products.
If you believe you have received a defective product, or are experiencing any problems with your product, please contact us.
This warranty strictly does not cover damages that arose from negligence, misuse, wear and tear, or not in accordance with product instructions (dropping the product, etc.).
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Your payment information is processed securely. We do not store credit card details nor have access to your credit card information.
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Visa, MasterCard, American Express, Paypal, Shopify Payments, Shop Pay and more.