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When films growth under nonequilibrium conditions, phenomena not predicted from microscopic interactions emerge at the macroscopic level. Statistical Physics concepts and methods are then the meaningful methodology to study the problem. This book discusses the influence of the particle/particle and particle/substrate interaction rules on the morphology of the obtained film. Based on the work of the author's phD thesis, interesting structures are discussed, emerging from simple interacting rules as the ones from random sequential adsorption process either in the presence of patterned substrates or during competitive adsorption of particles with different sizes. For the growth regime where diffusion of particles on the substrate cannot be neglected, the influence of the flux of impinging particles on the nucleation and growth of islands is also covered.
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