Nonlinear dynamics of M&NEMS resonant sensors: Design strategies for performance enhancement,Used

Nonlinear dynamics of M&NEMS resonant sensors: Design strategies for performance enhancement,Used

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The mechanical transduction gain of nanoelectromechanical systems (NEMS) has been thoroughly studied, but the drive power has always been a priori limited to the onset of nonlinearities. Besides, the smaller the structures, the sooner nonlinearities occur, reducing their dynamic range and even making extremely difficult to detect their oscillation. In this thesis, this limitation is reconsidered, i.e. the nonlinear dynamics of M&NEMS sensors is investigated. Several analytical design rules are provided in order to enhance the dynamic range of nanoresonators and the detection limit of NEMSbased resonant sensors. These rules essentially include hysteresis suppression by nonlinearity cancellation as well as mixed behavior and pullin retarding under superharmonic resonance and simultaneous resonances leading to the possibility of driving the resonator linearly at high oscillations compared to the critical amplitude. The experimental validation of the model has been performed in the case of resonant capacitive MEMS and M&NEMS accelerometers and gyroscopes as well as capacitive and piezoresistive gas/mass sensors.

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We provide a 2-year limited warranty, from the date of purchase for all our products.

If you believe you have received a defective product, or are experiencing any problems with your product, please contact us.

This warranty strictly does not cover damages that arose from negligence, misuse, wear and tear, or not in accordance with product instructions (dropping the product, etc.).

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