Physical Design and Mask Synthesis for Directed SelfAssembly Lithography (NanoScience and Technology),Used

Physical Design and Mask Synthesis for Directed SelfAssembly Lithography (NanoScience and Technology),Used

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SKU: DADAX3030094553
Brand: Springer
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This book discusses physical design and mask synthesis of directed selfassembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed selfassembly lithography (DSAL) is a highly promising patterning solution in sub7nm technology.

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