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If you have any questions, you are always welcome to contact us. We'll get back to you as soon as possible, withing 24 hours on weekdays.
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All questions about your order, return and delivery must be sent to our customer service team by e-mail at yourstore@yourdomain.com
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In semiconductor industry, material property degradation due to process is a critical factor that limits the device performance. Processinduced damage on a variety of dielectric materials is discussed and measured. Results from various metrologies are packaged and correlated into systematic theory. Chargeinduced, chemical, and physical damage source in plasma process environment is identified and optimized. Two sample types of dielectrics are investigated: highk dielectrics used in device technology and lowk dielectrics as observed in interconnect technology.
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birth defects, or other reproductive harm.
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