Plazmennye istochniki ionov s polym katodom: sovershenstvovanie i primenenie v tekhnologiyakh mikroelektroniki (Russian Edition),Used

Plazmennye istochniki ionov s polym katodom: sovershenstvovanie i primenenie v tekhnologiyakh mikroelektroniki (Russian Edition),Used

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SKU: DADAX3659295922
Brand: LAP Lambert Academic Publishing
Condition: New
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Nastoyashchaya rabota posvyashchena novym aspektam nauchnogo issledovaniya, modernizatsii i primeneniya istochnikov ionov na osnove gazovogo razryada s polym katodom. Nesmotrya na to, chto istochniki dannogo tipa obladayut ryadom besspornykh dostoinstv, ob ikh uspeshnom primenenii v sovremennykh tekhnologiyakh mikroelektroniki izvestno krayne malo. V svyazi s etim, avtor izuchaet rabotu istochnikov na khimicheski aktivnykh gazakh, v chislo kotorykh vkhodyat organicheskie soedineniya dlya nabirayushchey khod uglerodnoy (organicheskoy) elektroniki i detal'no opisyvaet protsessy sozdaniya novykh tekhnologicheskikh istochnikov s uluchshennymi tekhnicheskimi kharakteristikami. Pomimo etogo, v chislo predstavlennykh v knige razrabotok vkhodyat istochniki s bol'shoy ploshchad'yu poperechnogo secheniya puchka chastits, vostrebovannye promyshlennymi proizvodstvennymi ustanovkami. Avtor privodit rezul'taty razrabotki i analiza osnov tekhnologiy sinteza razlichnykh modifikatsiy tonkikh plenok ugleroda, a takzhe ochistki podlozhek mikroplat neposredstvenno s pomoshch'yu puchkov ionov.

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