Title
Principles of Plasma Discharges and Materials Processing,Used
Delivery time: 8-12 business days (International)
Timely, authoritative, pedagogically consistent a valuable professional resource and a superior didactic tool. Authored by two internationally respected pioneers in the field, this book offers a fully integrated, pedagogically consistent presentation of the fundamental physics and chemistry of partially ionized, chemically reactive, lowpressure plasmas and their roles in a wide range of plasma discharges and processes used in thin film processing applicationsespecially in the fabrication of integrated circuits. With many fully worked examples, practice exercises, and clear demonstrations of the relationship of plasma parameters to external control parameters and processing results, this book combines the best qualities of a student text and a professional resource. Indepth coverage of the fundamentals of plasma physics and chemistryincludes separate chapters on atomic and molecular collisions Applies basic theory to plasma discharges, including calculations of plasma parameters and scaling of plasma parameters with control parameters Applies results to basic processing mechanisms and the effects of plasma parameters on those mechanisms Uses numerous worked examples to demonstrate the relationships between control parameters, plasma parameters, and processing results
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⚠️ WARNING (California Proposition 65):
This product may contain chemicals known to the State of California to cause cancer, birth defects, or other reproductive harm.
For more information, please visit www.P65Warnings.ca.gov.
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We ship your order within 2–3 business days for USA deliveries and 5–8 business days for international shipments. Once your package has been dispatched from our warehouse, you'll receive an email confirmation with a tracking number, allowing you to track the status of your delivery.
Returns
To facilitate a smooth return process, a Return Authorization (RA) Number is required for all returns. Returns without a valid RA number will be declined and may incur additional fees. You can request an RA number within 15 days of the original delivery date. For more details, please refer to our Return & Refund Policy page.
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Warranty
We provide a 2-year limited warranty, from the date of purchase for all our products.
If you believe you have received a defective product, or are experiencing any problems with your product, please contact us.
This warranty strictly does not cover damages that arose from negligence, misuse, wear and tear, or not in accordance with product instructions (dropping the product, etc.).
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