RuntoRun Control in Semiconductor Manufacturing,Used

RuntoRun Control in Semiconductor Manufacturing,Used

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SKU: SONG0849311780
Brand: CRC Press
Condition: Used
$296.11
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Runtorun (R2R) control is cuttingedge technology that allows modification of a product recipe between machine 'runs,' thereby minimizing process drift, shift, and variabilityand with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering indepth analyses of R2R control.

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