Semiconductor Manufacturing Technology

Semiconductor Manufacturing Technology

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SKU: SONG0130815209
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In This Book, Quirk And Serda Introduce The Terminology, Concepts, Processes, Products, And Equipment Commonly Used In The Manufacture Of Ultra Large Scale Integrated (Ulsi) Semiconductors. The Book Provides Helpful, Uptodate Technical Information About Semiconductor Manufacturing And Strikes An Effective Balance Between The Process And Equipment Technology Found In Wafer Fabrications. Topics Include Copper Interconnect; Dual Damascene Additive Process For Metallization; Deep Uv Submicron Photolithography (.18 Micron And Below); Lowk Dielectric Processing; Chemical Mechanical Planarization; A Comprehensive Model Of Manufacturing Process; Chemicalmechanical Polish (Cmp); And Maintenance And Troubleshooting. For Practicing Semiconductor Manufacturing Technicians Or Those Interested In Semiconductor Manufacturing Technology And Processes.

⚠️ WARNING (California Proposition 65):

This product may contain chemicals known to the State of California to cause cancer, birth defects, or other reproductive harm.

For more information, please visit www.P65Warnings.ca.gov.

  • Q: What is the main focus of 'Semiconductor Manufacturing Technology'? A: The book primarily focuses on the terminology, concepts, processes, products, and equipment used in the manufacture of ultra large scale integrated (ULSI) semiconductors.
  • Q: Who are the authors of this book? A: The authors of 'Semiconductor Manufacturing Technology' are Michael Quirk and Robert Serda.
  • Q: What topics are covered in this book? A: Key topics include copper interconnect, dual damascene processes for metallization, deep UV sub-micron photolithography, low-k dielectric processing, chemical mechanical planarization, and maintenance and troubleshooting.
  • Q: Is this book suitable for beginners in semiconductor manufacturing? A: While the book contains valuable information for all levels, it is particularly beneficial for practicing semiconductor manufacturing technicians and those interested in the technology and processes.
  • Q: What is the publication date of 'Semiconductor Manufacturing Technology'? A: The book was published on November 19, 2000.
  • Q: How many pages does the book contain? A: The book consists of 666 pages.
  • Q: What is the binding type of this book? A: The book is available in paperback binding.
  • Q: What condition is the book in? A: The item condition is classified as 'Good'.
  • Q: Is there a specific edition of the book? A: Yes, this book is the first edition.
  • Q: Can this book help with troubleshooting in semiconductor manufacturing? A: Yes, the book provides insights into maintenance and troubleshooting, making it a useful resource for technicians.

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