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If you have any questions, you are always welcome to contact us. We'll get back to you as soon as possible, withing 24 hours on weekdays.
Customer service
All questions about your order, return and delivery must be sent to our customer service team by e-mail at yourstore@yourdomain.com
Sale & Press
If you are interested in selling our products, need more information about our brand or wish to make a collaboration, please contact us at press@yourdomain.com
Die homogene Beschichtung von Substraten mit widerstandsfhigen Maskenmaterialien ist ein Schlsselschritt in der Halbleitertechnologie. Dieses Buch befasst sich mit dem konomisch vorteilhaften SpinCoatingVerfahren zur Applikation von geeigneten ZirkoniumdioxidSchichten auf 300 mm SiliziumWafern. Ausgehend von flssigen Solen werden ber SolGelTransformation feste Schichten erhalten, deren Eigenschaften fr die Anwendung einstellbar sind. Mittels der entwickelten Beschichtungsstrategien sind nanokristalline ZirkoniumdioxidFilme zugnglich, deren ausgezeichnete Dichte und Hrteeigenschaften den Weg zum Einsatz als Hartmaskenmaterialien ebnen. Das Anwendungspotential wird anhand spezifischer tzversuche gezeigt. Die aus den umfassenden analytischen Untersuchungen gewonnenen Erkenntnisse liefern einen essentiellen Beitrag zum Verstndnis des Temperverhaltens von SolGelSchichten.
⚠️ WARNING (California Proposition 65):
This product may contain chemicals known to the State of California to cause cancer,
birth defects, or other reproductive harm.
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⚠️ California Proposition 65 Warning: Some products sold on this website may expose you to chemicals known to the State of California to cause cancer, birth defects, or other reproductive harm. For more information, visit www.P65Warnings.ca.gov.
