Title
Vapor Phase Deposition of Organic Semiconductors: Application to Field Effect Transistors,Used
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The coming of age of organic circuits requires the development of highperformance and costeffective processing techniques. In this work, the Organic Vapor Phase Deposition (OVPD?) is investigated for the production of thin semiconducting films used as the active layer of circuits. Two OVPD systems are described: A Static system that is inspired from a chemical vapor phase deposition tool and an Inline system that accommodates a linearly moving substrate and is rolltoroll compatible. These two tools are tested for the growth of pentacene and PTCDIC13, two highmobility organic semiconductors. State of the art transistors and circuits on flexible substrates based on films of these materials are demonstrated. By means of transport and growth modeling supported by experimental results, it is shown how growth parameters can be optimized to lead to high material utilization efficiencies, to high thickness uniformities and to record film growth speeds. As a conclusion, this work shows that OVPD is a very promising candidate for the lowcost production of highperformance organic semiconducting thin films.
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We provide a 2-year limited warranty, from the date of purchase for all our products.
If you believe you have received a defective product, or are experiencing any problems with your product, please contact us.
This warranty strictly does not cover damages that arose from negligence, misuse, wear and tear, or not in accordance with product instructions (dropping the product, etc.).
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